Argon0 – Argon Gas Recycling

Argon0- argon gas recycling

The ArgonØ ™ is a world first in point of use gas recycling, allowing cost effective recycling of Argon as well as other inert purge gases such as helium and xenon. The system recycles gas in a closed loop from a limited number of process tools, this gives the big advantage over potential plant wide installations of easy, straightforward retrofit into existing wafer manufacturing plants as well as allowing a phased installation, in line with the process tools, into new “ground up” facilities.

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